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Microsystems and Nanotechnology || MEMS Processing and Fabrication Techniques and Technology—Silicon-Based Micromachining
Zhou, Zhaoying, Wang, Zhonglin, Lin, LiweiVolume:
10.1007/97
Year:
2012
Language:
english
DOI:
10.1007/978-3-642-18293-8_9
File:
PDF, 3.60 MB
english, 2012