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Carbon doping and etching of MOCVD-grown GaAs, InP, and related ternaries using CC14
A.E. Kibbler, Sarah R. Kurtz, J.M. OlsonVolume:
109
Year:
1991
Language:
english
Pages:
6
DOI:
10.1016/0022-0248(91)90187-a
File:
PDF, 484 KB
english, 1991