Effect of mesa shape on the planarity of InP regrowths performed by atmospheric pressure and low pressure selective metalorganic vapor phase epitaxy
J.L. Zilko, B.P. Segner, U.K. Chakrabarti, R.A. Logan, J. Lopata, D.L. Van Haren, J.A. LongVolume:
109
Year:
1991
Language:
english
Pages:
6
DOI:
10.1016/0022-0248(91)90188-b
File:
PDF, 801 KB
english, 1991