Microscale Glass-Blown Three-Dimensional Spherical Shell...

Journal of Microelectromechanical Systems 2011 / 06 Vol. 20; Iss. 3

Microscale Glass-Blown Three-Dimensional Spherical Shell Resonators

Prikhodko, Igor P., Zotov, Sergei A., Trusov, Alexander A., Shkel, Andrei M.
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Volume:
20
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2011.2127453
Date:
June, 2011
File:
PDF, 2.10 MB
english, 2011
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