Fabrication of bridged-grain polycrystalline silicon thin film transistors by nanoimprint lithography
Zhou, Wei, Ho, Jacob Yeuk Lung, Zhao, Shuyun, Chen, Rongsheng, Wong, Man, Kwok, Hoi-SingVolume:
534
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.02.114
Date:
May, 2013
File:
PDF, 1.15 MB
english, 2013