Fabrication of bridged-grain polycrystalline silicon thin...

Fabrication of bridged-grain polycrystalline silicon thin film transistors by nanoimprint lithography

Zhou, Wei, Ho, Jacob Yeuk Lung, Zhao, Shuyun, Chen, Rongsheng, Wong, Man, Kwok, Hoi-Sing
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Volume:
534
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.02.114
Date:
May, 2013
File:
PDF, 1.15 MB
english, 2013
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