Formation of TiN by nitridation of magnetron sputtered Ti...

Formation of TiN by nitridation of magnetron sputtered Ti films using microwave plasma CVD

Jong Moon, Toshimichi Ito, Jing Sheng Ma, Akio Hiraki
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Volume:
115
Year:
1991
Language:
english
Pages:
7
DOI:
10.1016/0022-0248(91)90809-j
File:
PDF, 402 KB
english, 1991
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