The effect of bottom electrode on the performance of thin...

The effect of bottom electrode on the performance of thin film based capacitors in the gigahertz region

Dube, D. C., Baborowski, J., Muralt, P., Setter, N.

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Volume:

Year:

1999

Language:

english

Journal:

Applied Physics Letters

DOI:

10.1063/1.124156

File:

PDF, 289 KB

english, 1999

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