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The effect of bottom electrode on the performance of thin film based capacitors in the gigahertz region
Dube, D. C., Baborowski, J., Muralt, P., Setter, N.Volume:
74
Year:
1999
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.124156
File:
PDF, 289 KB
english, 1999