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Simulation study of wave phenomena from the sheath region in single frequency capacitively coupled plasma discharges; field reversals and ion reflection
Sharma, S., Turner, M. M.Volume:
20
Year:
2013
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.4816952
File:
PDF, 20.13 MB
english, 2013