Characterisation of silicon carbide and silicon nitride...

Diamond and Related Materials 2002 / 3 Vol. 11; Iss. 3-6

Characterisation of silicon carbide and silicon nitride thin films and Si3N4/SiC multilayers

Lattemann, M., Ulrich, S., Holleck, H., Stüber, M., Leiste, H.
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Volume:
11
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(01)00622-7
Date:
March, 2002
File:
PDF, 605 KB
english, 2002
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