Strain relaxation in Si−xGex layers on Si(001)

Strain relaxation in Si−xGex layers on Si(001)

M.A. Capano, L. Hart, D.K. Bowen, D. Gordon-Smith, C.R. Thomas, C.J. Gibbings, M.A.G. Halliwell, L.W. Hobbs
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Volume:
116
Year:
1992
Language:
english
Pages:
11
DOI:
10.1016/0022-0248(92)90632-s
File:
PDF, 1.38 MB
english, 1992
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