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Atomic layer epitaxy of ZnS by a new gas supplying system in low-pressure metalorganic vapor phase epitaxy
Shigeki Yamaga, Akihiko YoshikawaVolume:
117
Year:
1992
Language:
english
Pages:
4
DOI:
10.1016/0022-0248(92)90735-2
File:
PDF, 302 KB
english, 1992