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Study on the accumulated impurities at the epilayer/substrate interface and their influence on the leakage current of metal-semiconductor-field effect transistors
Shigekazu Izumi, Naoto Yoshida, Hirozo Takano, Kazuo Nishitani, Mutsuyuki OtsuboVolume:
133
Year:
1993
Language:
english
Pages:
9
DOI:
10.1016/0022-0248(93)90112-a
File:
PDF, 729 KB
english, 1993