Epitaxial growth and structural characterization of erbium...

Journal of Crystal Growth 1993 Vol. 134; Iss. 3-4

Epitaxial growth and structural characterization of erbium silicide formed on (100) Si through a solid phase reaction

Young Ki Lee, Norifumi Fujimura, Taichiro Ito, Nobuo Itoh
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Volume:
134
Year:
1993
Language:
english
Pages:
8
DOI:
10.1016/0022-0248(93)90133-h
File:
PDF, 641 KB
english, 1993
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