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A nonisothermal film model for mass-transfer-limited selective epitaxial growth of silicon on patterned surfaces
Nathan Desatnik, Bala Subramaniam, Brian E. ThompsonVolume:
131
Year:
1993
Language:
english
Pages:
9
DOI:
10.1016/0022-0248(93)90211-e
File:
PDF, 661 KB
english, 1993