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A numerical study of the influence of feeding polycrystalline silicon granules on melt temperature in the continuous Czochralski process
Naoki Ono, Michio Kida, Yoshiaki Arai, Kensho SahiraVolume:
132
Year:
1993
Language:
english
Pages:
8
DOI:
10.1016/0022-0248(93)90273-y
File:
PDF, 670 KB
english, 1993