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Metalorganic chloride vapor phase epitaxial growth of III–V compounds in a single reactor
Susumu Kondo, Shin'ichi Matsumoto, Haruo NagaiVolume:
132
Year:
1993
Language:
english
Pages:
10
DOI:
10.1016/0022-0248(93)90274-z
File:
PDF, 1.63 MB
english, 1993