Heteroepitaxy of AlN on α-Al2O3 by electron cyclotron...

Heteroepitaxy of AlN on α-Al2O3 by electron cyclotron resonance plasma-assisted chemical vapor deposition at low temperatures

Wei Zhang, Yoshihiro Someno, Makoto Sasaki, Toshio Hirai
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
132
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0022-0248(93)90279-6
File:
PDF, 395 KB
english, 1993
Conversion to is in progress
Conversion to is failed