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Heteroepitaxy of AlN on α-Al2O3 by electron cyclotron resonance plasma-assisted chemical vapor deposition at low temperatures
Wei Zhang, Yoshihiro Someno, Makoto Sasaki, Toshio HiraiVolume:
132
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0022-0248(93)90279-6
File:
PDF, 395 KB
english, 1993