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Sequential etching of GaAs
Nordquist, P.E.R., Henry, R.L., Gorman, R.J.Volume:
128
Language:
english
Pages:
5
Journal:
Journal of Crystal Growth
DOI:
10.1016/0022-0248(93)90372-4
Date:
March, 1993
File:
PDF, 262 KB
english, 1993