Defect formation in semiconductor layers during epitaxial growth
Steiner, Bruce, Tseng, Wen, Comas, James, Laor, Uri, Dobbyn, Ronald G., Rajan, KrishnaVolume:
128
Language:
english
Pages:
7
Journal:
Journal of Crystal Growth
DOI:
10.1016/0022-0248(93)90383-8
Date:
March, 1993
File:
PDF, 571 KB
english, 1993