A theory for metalorganic vapor phase epitaxial selective...

A theory for metalorganic vapor phase epitaxial selective growth on planar patterned substrates

Takuya Fujii, Mitsuru Ekawa, Susumu Yamazaki
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Volume:
146
Year:
1995
Language:
english
Pages:
7
DOI:
10.1016/0022-0248(94)00498-6
File:
PDF, 463 KB
english, 1995
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