Oxygen transport analysis in Czochralski silicon melt by...

Journal of Crystal Growth 1995 Vol. 148; Iss. 1-2

Oxygen transport analysis in Czochralski silicon melt by considering the oxygen evaporation from the melt surface

Shinji Togawa, Xinming Huang, Koji Izunome, Kazutaka Terashima, Shigeyuki Kimura
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Volume:
148
Year:
1995
Language:
english
Pages:
9
DOI:
10.1016/0022-0248(94)00655-5
File:
PDF, 527 KB
english, 1995
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