Spoke patterns on molten silicon in Czochralski system
Kyung-Woo Yi, Koichi Kakimoto, Minoru Eguchi, Masahito Watanabe, Toshiyuki Shyo, Taketoshi HibiyaVolume:
144
Year:
1994
Language:
english
Pages:
9
DOI:
10.1016/0022-0248(94)90005-1
File:
PDF, 750 KB
english, 1994