Formation of nanocrystallites in amorphous silicon thin...

Formation of nanocrystallites in amorphous silicon thin films

Olaf Schoenfeld, X. Zhao, T. Hempel, J. Blaesing, Y. Aoyagi, T. Sugano
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Volume:
142
Year:
1994
Language:
english
Pages:
3
DOI:
10.1016/0022-0248(94)90295-x
File:
PDF, 254 KB
english, 1994
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