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Formation of nanocrystallites in amorphous silicon thin films
Olaf Schoenfeld, X. Zhao, T. Hempel, J. Blaesing, Y. Aoyagi, T. SuganoVolume:
142
Year:
1994
Language:
english
Pages:
3
DOI:
10.1016/0022-0248(94)90295-x
File:
PDF, 254 KB
english, 1994