Determination of oxygen concentration in heavily Sb-doped...

Journal of Crystal Growth 1994 Vol. 144; Iss. 3-4

Determination of oxygen concentration in heavily Sb-doped Si by means of coincident elastic recoil detection analysis

Yuesheng Xu, Caichi Liu, Yangxian Li, Zeshao Zhu, Hongmei Wang, Luncun Wei
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Volume:
144
Year:
1994
Language:
english
Pages:
4
DOI:
10.1016/0022-0248(94)90452-9
File:
PDF, 267 KB
english, 1994
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