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Correlation between temperature and impurity concentration fluctuations in silicon crystals grown by the Czochralski method
Koichi Kakimoto, Toshiyuki Shyo, Minoru EguchiVolume:
151
Year:
1995
Language:
english
Pages:
5
DOI:
10.1016/0022-0248(95)00033-x
File:
PDF, 383 KB
english, 1995