Control of oxygen concentration in heavily antimony-doped...

Journal of Crystal Growth 1995 Vol. 151; Iss. 3-4

Control of oxygen concentration in heavily antimony-doped Czochralski Si crystals by ambient argon pressure

Koji Izunome, Xinming Huang, Shiniji Togawa, Kazutaka Terashima, Shigeyuki Kimura
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Volume:
151
Year:
1995
Language:
english
Pages:
4
DOI:
10.1016/0022-0248(95)00097-6
File:
PDF, 276 KB
english, 1995
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