Thermal stability of Si/Si1 − x − yGexCy/Si...

Thermal stability of Si/Si1 − x − yGexCy/Si heterostructures grown by rapid thermal chemical vapor deposition

Patricia Warren, Jian Mi, Frédéric Overney, Michel Dutoit
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Volume:
157
Year:
1995
Language:
english
Pages:
6
DOI:
10.1016/0022-0248(95)00334-7
File:
PDF, 424 KB
english, 1995
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