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Relaxed Si1−xGex films with reduced dislocation densities grown by molecular beam epitaxy
Martin O. Tanner, Michael A. Chu, Kang L. Wang, Marjohn Meshkinpour, Mark S. GoorskyVolume:
157
Year:
1995
Language:
english
Pages:
5
DOI:
10.1016/0022-0248(95)00379-7
File:
PDF, 323 KB
english, 1995