Effect of RTCVD growth conditions on the crystal quality of...

Journal of Crystal Growth 1995 Vol. 157; Iss. 1-4

Effect of RTCVD growth conditions on the crystal quality of pseudomorphic Si1-x-yGexCy films

Jian Mi, Patricia Warren, Pascal Letourneau, Moshe Judelewicz, Marc Gailhanou, Michel Dutoit
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Volume:
157
Year:
1995
Language:
english
Pages:
5
DOI:
10.1016/0022-0248(95)00407-6
File:
PDF, 346 KB
english, 1995
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