Inhibition of neutron irradiation on oxidation stacking...

Journal of Crystal Growth 1996 Vol. 160; Iss. 3-4

Inhibition of neutron irradiation on oxidation stacking faults on the surface of Si wafers

Yangxian Li, Yulin Ju, Caichi Liu, Yuesheng Xu, Hongmei Wang
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Volume:
160
Year:
1996
Language:
english
Pages:
3
DOI:
10.1016/0022-0248(95)00432-7
File:
PDF, 190 KB
english, 1996
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