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Kinetics of microclusters in nonequilibrium plasma magnetron sputtering
K. Obara, T. Koshimae, Y. Kubo, Y. SuemotoVolume:
166
Year:
1996
Language:
english
Pages:
5
DOI:
10.1016/0022-0248(95)00480-7
File:
PDF, 338 KB
english, 1996