Influence of melt-temperature fluctuations on striation formation in large-scale Czochralski Si growth systems
Tadashi Kanda, Masataka Hourai, Shinichiro Miki, Tatsuhiko Shigematsu, Hajime Tomokage, Takaya Miyano, Hiroshi Morita, Akira ShintaniVolume:
166
Year:
1996
Language:
english
Pages:
6
DOI:
10.1016/0022-0248(95)00522-6
File:
PDF, 433 KB
english, 1996