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SiC liquid-phase epitaxy on patterned substrates
A.E. Nikolaev, V.A. Ivantsov, S.V. Rendakova, M.N. Blashenkov, V.A. DmitrievVolume:
166
Year:
1996
Language:
english
Pages:
5
DOI:
10.1016/0022-0248(95)00566-8
File:
PDF, 413 KB
english, 1996