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Doping efficiency and plasma analysis of a nitrogen electron cyclotron resonance plasma
M. Grün, N. Sadeghi, J. Cibert, Y. Genuist, A. TserepiVolume:
159
Year:
1996
Language:
english
Pages:
5
DOI:
10.1016/0022-0248(95)00763-6
File:
PDF, 386 KB
english, 1996