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〈0001〉-oriented growth of AlN films on Si(111) by microwave plasma CVD with AlBr3NH3N2 system
Guangyao Meng, Xi Liu, Song Xie, Dingkun PengVolume:
163
Year:
1996
Language:
english
Pages:
6
DOI:
10.1016/0022-0248(95)00966-3
File:
PDF, 479 KB
english, 1996