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Numerical prediction of operational parameters in Czochralski growth of large-scale Si
Hyung-Tae Chung, Seung-Cheol Lee, Jong-Kyu YoonVolume:
163
Year:
1996
Language:
english
Pages:
10
DOI:
10.1016/0022-0248(95)00978-7
File:
PDF, 581 KB
english, 1996