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The etching effect of trisdimethylaminoantimony on (001) planar substrates
A.B. Villaflor, H. Asahi, D. Marx, K. Miki, K. Yamamoto, S. GondaVolume:
150
Year:
1995
Language:
english
Pages:
6
DOI:
10.1016/0022-0248(95)80287-m
File:
PDF, 570 KB
english, 1995