VLS growth of silicon whiskers on a patterned...

Journal of Crystal Growth 1996 Vol. 165; Iss. 1-2

VLS growth of silicon whiskers on a patterned silicon-on-insulator (SOI) wafer

Yoshihiko Okajima, Masaru Amemiya, Kazuo Kato, Shin'ichiro Asai
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
165
Year:
1996
Language:
english
Pages:
5
DOI:
10.1016/0022-0248(96)00158-3
File:
PDF, 596 KB
english, 1996
Conversion to is in progress
Conversion to is failed