Optimization of Design and Fabrication Processes for...

Journal of Microelectromechanical Systems 2007 / 04 Vol. 16; Iss. 2

Optimization of Design and Fabrication Processes for Realization of a PDMS-SOG-Silicon DNA Amplification Chip

Bhattacharya, Shantanu, Gao, Yuanfang, Korampally, Venumadhav, Othman, Maslina T., Grant, Sheila A., Kleiboeker, Steven B., Gangopadhyay, Keshab, Gangopadhyay, Shubhra
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Volume:
16
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2007.892926
Date:
April, 2007
File:
PDF, 1.32 MB
english, 2007
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