[IEEE ICMTS 2002. 2003 International Conference on...

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[IEEE ICMTS 2002. 2003 International Conference on Microelectronic Test Structures - Monterey, CA, USA (17-20 March 2003)] International Conference on Microelectronic Test Structures, 2003. - Series resistance estimation and C(V) measurements on ultra thin oxide MOS capacitors

Rideau, D., Scheer, P., Roy, D., Gouget, G., Minondo, M., Juge, A.
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Year:
2003
Language:
english
DOI:
10.1109/ICMTS.2003.1197460
File:
PDF, 391 KB
english, 2003
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