Development of a Low-Dielectric-Constant Polymer for the Fabrication of Integrated Circuit Interconnect
S. J. Martin, J. P. Godschalx, M. E. Mills, E. O. Shaffer II, P. H. TownsendVolume:
12
Year:
2000
Language:
english
Pages:
10
DOI:
10.1002/1521-4095(200012)12:233.0.co;2-5
File:
PDF, 429 KB
english, 2000