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SPIE Proceedings [SPIE Electron Technology Conference 2013 - Ryn, Poland (Tuesday 16 April 2013)] Electron Technology Conference 2013 - Fabrication and measurement of micromechanical bridge structures for mass change detection
Moczała, Magdalena M., Sierakowski, Andrzej, Dobrowolski, Rafał, Grabiec, Piotr, Gotszalk, Teodor P., Szczepanski, Pawel, Kisiel, Ryszard, Romaniuk, Ryszard S.Volume:
8902
Year:
2013
Language:
english
DOI:
10.1117/12.2031053
File:
PDF, 433 KB
english, 2013