Spatial evolution of friction of a textured wafer surface

Spatial evolution of friction of a textured wafer surface

Huaping Xiao, Ke Wang, Grant Fox, Michel Belin, Julien Fontaine, Hong Liang
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Volume:
1
Language:
english
DOI:
10.1007/s40544-013-0008-0
Date:
March, 2013
File:
PDF, 657 KB
english, 2013
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