Study of small holes on monocrystalline silicon cut by WEDM

Materials Science in Semiconductor Processing 2013 / 4 Vol. 16; Iss. 2

Study of small holes on monocrystalline silicon cut by WEDM

Huijun, Pan, Zhidong, Liu, Lian, Gao, Mingbo, Qiu, Zongjun, Tian
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
16
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2012.09.006
Date:
April, 2013
File:
PDF, 1.30 MB
english, 2013
Conversion to is in progress
Conversion to is failed