Effects of pulsed ruby-laser annealing on As and Sb implanted silicon
White, C. W., Pronko, P. P., Wilson, S. R., Appleton, B. R., Narayan, J., Young, R. T.Volume:
50
Year:
1979
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.326366
File:
PDF, 1.21 MB
english, 1979