Parameter optimization of etching process for a LGP stamper

Parameter optimization of etching process for a LGP stamper

Wen-Chin Chen, Yi-Chia Tai, Min-Wen Wang…
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Volume:
23
Language:
english
DOI:
10.1007/s00521-012-1103-2
Date:
November, 2013
File:
PDF, 598 KB
english, 2013
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