Design, fabrication and characterization of a piezoelectrically actuated bidirectional polymer micropump
H. Feth, F. Pothof, F. Thoma, T. Schmidt, C. Mueller…Volume:
20
Language:
english
DOI:
10.1007/s00542-013-1865-1
Date:
July, 2014
File:
PDF, 1.05 MB
english, 2014