Synthesis of ZnO thin films and their application as...

Microsystem Technologies 2013 / 11 Vol. 19; Iss. 11

Synthesis of ZnO thin films and their application as humidity sensors

Nai-Feng Hsu, Ming Chang, Chia-Hung Lin
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Volume:
19
Language:
english
DOI:
10.1007/s00542-013-1830-z
Date:
November, 2013
File:
PDF, 612 KB
english, 2013
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