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Effects of package on the performance of MEMS piezoresistive accelerometers
Ping Li, Shiqiao Gao, Haipeng Liu, Jun Liu, Yunbo ShiVolume:
19
Language:
english
DOI:
10.1007/s00542-012-1711-x
Date:
August, 2013
File:
PDF, 565 KB
english, 2013