Development of local ambient gas control technologies for...

Microsystem Technologies 2013 / 06 Vol. 19; Iss. 6

Development of local ambient gas control technologies for atmospheric MEMS process

Teruki Naito, Nobuaki Konno, Takashi Tokunaga, Toshihiro Itoh
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
19
Language:
english
DOI:
10.1007/s00542-013-1761-8
Date:
June, 2013
File:
PDF, 1.14 MB
english, 2013
Conversion to is in progress
Conversion to is failed